品牌
其他厂商性质
上海市所在地
● X-Y travel coarse300 mm x 300 mm
● X-Y travel fine10 mm x 10 mm (resolution < 1 µm)
● Z up/down 10 mm
● Theta travel ± 7º
● Planarity < ± 5µm
● Z travel 25mm
● resolution < ± 1 µm
● Travel rangeX-Y-Z 50 mm x 50 mm x 50 mm
● Resolution <1um
● Power 220V, 50Hz
● Vacuum -0.8 bar
● Compressed air 4 bar