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其他厂商性质
所在地
D-TEK Stratus 冷媒检漏仪和便携式监视器
面议用于 Transpector CPM(紧凑型过程监控器)的手推车
面议Gemini™ 大气压至超高真空真空计
面议PEG100 中真空至超高真空真空计
面议PSG55x 大气压至中真空真空计3
面议PSG5xx 大气压至中真空真空计
面议PCG55x 大气压至中真空真空计2
面议SKY CDG025D-X3 4-20mA current loop 0.1 ... 1000 托 / 毫巴过程压力真空计
面议PCG55x 大气压至中真空真空计
面议PSG55x 大气压至中真空真空计2
面议VGC083 真空计控制器
面议BAG05x UHV Bayard Alpert 热电离被动真空计
面议好处
Long lifetime in harsh environments
在恶劣环境下,使用寿命长
典型应用
新闻
新一代冷阴极/冷阴极-皮拉尼组合真空计现在开放订购!
规格
类型 | MAG5xx | MPG5xx | |
---|---|---|---|
测量系统 | Cold cathode ionization measurement system (according to the inverted magnetron principle) | Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle) | |
测量范围(空气、氮气) | 1×10-9 … 1×10-2 | 1×10-9 … 1000 | |
准确度 (N2) | |||
1×10-8 … 1×10-2 毫巴 | % of reading | 30 | 30 |
1×10-2 … 100 毫巴 | % of reading | - | 30 |
100 … 1000 毫巴 | % of reading | - | 50 |
可重复性 (N2) | |||
1×10-8 … 1×10-2 毫巴 | % of reading | 5 | - |
1×10-8 … 100 毫巴 | % of reading | - | 5 |
安装定位 | any | any | |
容许压力 | bar (absolute) | 10 (limited to inert gases <> | 10 (limited to inert gases <> |
容许温度 | |||
运行(环境) | °C | +5 ... +55 | +5 ... +55 |
法兰烘烤 (1) | °C | <150 | <150 |
储存 | °C | -40 ... +70 | -40 ... +70 |
灯丝温度 | °C | - | 120 |
一年 30 天的相对湿度 | |||
1×10-7 … 1×10-2 毫巴 | % | <95 (non-condensing) | <95 (non-condensing) |
1×10-8 … 1×10-2 毫巴 | % | <70 (non-condensing) | <70 (non-condensing) |
供电电压 | |||
在量规 (2) | V (dc) | +14.5 ... +30 | +14.5 ... +30 |
波纹 | V (p-p) | <1 | <1 |
功耗 | W | <2 | <2 |
待连接的保险丝 | AT | <1 | <1 |
电压范围 | |||
模拟输出 | V | 0 ... +10.5 | 0 ... +10.5 |
测量范围 | |||
3MAx-xxx-xxxN | V | <+0.5 | |
3MBx-xxx-xxxP | V | - | |
3MAx-xxx-xxxQ | V | +0.667 ... +10 | |
电压比压力 | |||
3MAx-xxx-xxxN | volts per decade | 1 (logarithmic) | |
3MBx-xxx-xxxP | volts per decade | - | |
3MAx-xxx-xxxQ | volts per decade | 1.33 (logaritmic) | |
错误信号 | |||
3MAx-xxx-xxxN | V | <+0.5 | |
3MA-xxx-xxxQ | V | <+0.3 | |
3MBx-xxx-xxxP | V | - | |
Output impedance | Ω | 2 x 4.7 (short circuit-proof) | |
Load impedance | kΩ | >10 (short circuit-proof) | |
阶跃响应时间 | |||
p > 10-6 毫巴 | ms | <100 | <100 |
p = 10-8 毫巴 | s | ~1 | |
量规标识 (FCC connector gauges) | |||
3MAx-0xx-000N | kΩ | - | |
3MAx-0xx-000Q | kΩ | 100 | |
3MBx-0xx-000P | kΩ | - | |
状态(针 6) | |||
Current rating | mA | 100 (sink) | |
High Voltage is ON | V (dc) | +14.5 ... +30 (depending on supply voltage) | |
High Voltage is OFF | V (dc) | 0 | |
Status signal, digital output (D-sub connector) | |||
Supply voltage | V (dc) | <30 | |
Current rating | mA | 100 | |
High voltage ON | V (dc) | 0 | |
High voltage OFF | open | ||
电气连接 | |||
3Mxx-0xx-000x | FCC68, 8-pin, female | ||
3Mxx-0xx-010x | D-sub, 9-pin, male | ||
3Mxx-0xx-04xx | D-Sub HD, 15-pin, male (for RS232/485 version) | ||
3Mxx-xxx-x2Gx | D-Sub HD, 15-pin, male (for EtherCAT Version) | ||
传感器电缆 | |||
3Mxx-0xx-000x | 8-pin, shielded | ||
3Mxx-0xx-010x | 9-pin, shielded | ||
3Mxx-0xx-04xx | D-Sub HD, 15-pin, male (for RS232/485 version) | ||
3Mxx-xxx-x2Gx | D-Sub HD, 15-pin, male (for EtherCAT Version) | ||
电缆长度 | |||
FCC connector cable | m | <50 (0.14 mm2/ conductor) | |
High voltage (in the measuring chamber) | |||
Ignition voltage | kV | <4.5 | |
工作电压 | kV | <3.3 | <3.3 |
Current (in the measuring chamber) | |||
High current | µA | <380 | |
Low current | µA | <130 | |
Setpoint relays (MxG55x) | |||
Range (N2) | mbar bar | 5x10-5 ... 1500 | |
Relay contact | normally open (NO), potential free | ||
Hysteresis | % of threshold | 10 | |
Contact rating of mechanical relays | V/A | <30/ <1 | |
Switching time | ms | <30 | |
曝露在真空的材料 | |||
3Mx0-xxx-xxxx | Ni alloy, Mo, AI2O3, glass, stainless steels | ||
3Mx3-xxx-xxxx | Mo, AI2O3, stainless steels | ||
3Mx0-11x-xxxx | Ni alloy, Mo, Al2O3, glass, Ti, stainless steels | ||
3Mx3-11x-xxxx | Mo, Al2O3, Ti, stainless steels | ||
内部容量 | |||
DN 25 ISO-KF | cm³ | ||
DN 40 ISO-KF | cm³ | ~20.9 | |
DN 40 CF-F | cm³ | ~25.2 | |
DN 40 CF-R | cm³ | ~25.6 | |
内部容量 | cm³ | 22.8 | 22.8 |
重量 (MxG50x) | |||
DN 25 ISO-KF | g | <280 | <280 |
DN 40 ISO-KF | g | <320 | |
DN 40 CF-F & CF-R | g | <570 | <570 |
Weight (MxG55x) | |||
DN 25 ISO-KF | g | <280 | <280 |
DN 40 ISO-KF | g | <320 | |
DN 40 CF-F & CF-R | g | <570 | <570 |
防护等级 | IP 40 | IP 40 | |
CE conformity | |||
RoHS | 2011/65/EU | ||
EMC | 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1 | ||
Safety | EN 61010-1 | ||
RS232C / 485C (MxG50x) | |||
Baud rates | kBaud | 9.6/ 19.2/ 38.4/ 57.6 | |
Address | 2 switches (address 00 - 255) | ||
Digital functions | Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error. | ||
Connector for RS232 & RS485 | D-Sub HD, 15-pin, male | ||
EtherCAT® (MxG55x) | |||
Protocol | EtherCAT®
| ||
Communication standard | ETG.5003.1 S (R) V1.1.0 4) ETG.5003.2080 S (R) V1.3.0 5) | ||
Node address | Explicit Device Identification | ||
Physical layer | 100Base-Tx (IEEE 802.3) | ||
Digital functions | Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error. | ||
EtherCAT connector | 2 x RJ45, 8-pin (socket), Input & output | ||
EtherCAT cable | Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher) | ||
Cable lenght | m (ft.) | <100 (330) |
1)没有电子元件。
2)电源单元的最小电压必须与传感器电缆的长度成比例地增加。
3)冷阴极点燃。
附件
MAG5xx | |
---|---|
零件号 | 明细 |
211-098 | 细目过滤中心环组件DN 25 ISO-KF |
351-550 | MxG50x 点火单元 |
211-113 | 中心圈 with baffle DN 25 KF |
353-512 | Baffle for BPG400 |
MPG5xx | |
零件号 | 明细 |
211-098 | 细目过滤中心环组件DN 25 ISO-KF |
351-550 | MxG50x 点火单元 |
211-113 | 中心圈 with baffle DN 25 KF |
353-512 | Baffle for BPG400 |
备件
MAG5xx | |
---|---|
零件号 | 明细 |
351-500 | MAG500 spare sensor, 25KF, SS |
351-556 | Spare ion chamber ti |
351-512 | MAG500 spare sensor, 40KF, SS |
351-536 | MAG500 spare sensor, 40CF-R, SS |
351-524 | MAG500 spare sensor, 40CF-F, SS |
351-502 | MAG500 spare sensor, 25KF, TI |
351-514 | MAG500 spare sensor, 40KF, TI |
351-538 | MAG500 spare sensor, 40CF-R, TI |
351-526 | MAG500 spare sensor, 40CF-F, TI |
351-501 | MAG504 spare sensor, 25KF, SS |
351-513 | MAG504 spare sensor, 40KF, SS |
351-537 | MAG504 spare sensor, 40CF-R, SS |
351-525 | MAG504 spare sensor, 40CF-F, SS |
351-503 | MAG504 Ersatzsensor, 25KF, TI |
351-515 | MAG504 spare sensor, 40KF, TI |
351-539 | MAG504 spare sensor, 40CF-R, TI |
351-527 | MAG504 spare sensor, 40CF-F, TI |
351-995 | 起辉器 |
351-555 | Spare ion chamber ss |
MPG5xx | |
零件号 | 明细 |
351-506 | MPG500 spare sensor, 25KF, SS |
351-518 | MPG500 spare sensor, 40KF, SS |
351-542 | MPG500 spare sensor, 40CF-R, SS |
351-530 | MPG500 spare sensor, 40CF-F, SS |
351-508 | MPG500 spare sensor, 25KF, TI |
351-520 | MPG500 spare sensor, 40KF, TI |
351-544 | MPG500 spare sensor, 40CF-R, TI |
351-532 | MPG500 spare sensor, 40CF-F, TI |
351-507 | MPG504 spare sensor, 25KF, SS |
351-519 | MPG504 spare sensor, 40KF, SS |
351-543 | MPG504 spare sensor, 40CF-R, SS |
351-531 | MPG504 spare sensor, 40CF-F, SS |
351-509 | MPG504 spare sensor, 25KF, TI |
351-521 | MPG504 spare sensor, 40KF, TI |
351-545 | MPG504 spare sensor, 40CF-R, TI |
351-533 | MPG504 spare sensor, 40CF-F, TI |
351-995 | 起辉器 |
351-555 | Spare ion chamber ss |
351-556 | Spare ion chamber ti |
数据表
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