Gemini™ MxG5xx  大气压至超高真空真空计

Gemini™ MxG5xx 大气压至超高真空真空计

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2022-10-24 15:10:05
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英福康(广州)真空仪器有限公司

英福康(广州)真空仪器有限公司

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产品简介

Gemini™ MxG5xx 大气压至超高真空真空计

详细介绍

好处

  • Long lifetime in harsh environments

  • 在恶劣环境下,使用寿命长

  • 低杂散磁场
  • 零维护 - 可换插头
  • 超紧凑尺寸
  • 抗腐蚀馈入装置
  • 可选测量电流
  • 2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
  • EtherCAT and RS232/ RS485 digital interace

典型应用

  • 基本压力监视和控制,在蒸发和溅射镀膜应用中从大气压到高真空。
  • 一般真空测量 - 工业炉、建筑玻璃、半导体、冰箱和空调。
  • 分析和研发应用 – 质谱分析、电子显微镜、医疗、眼科、光学和高能物理。

新闻

新一代冷阴极/冷阴极-皮拉尼组合真空计现在开放订购!

规格

类型 MAG5xx MPG5xx
测量系统 Cold cathode ionization measurement system (according to the inverted magnetron principle) Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
测量范围(空气、氮气) 1×10-9 … 1×10-2 1×10-9 … 1000
准确度 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 30

30

1×10-2 … 100 毫巴 % of reading - 30
100 … 1000 毫巴 % of reading - 50
可重复性 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 5 -
1×10-8 … 100 毫巴 % of reading - 5
安装定位 any any
容许压力 bar (absolute) 10 (limited to inert gases <> 10 (limited to inert gases <>
容许温度    
运行(环境) °C +5 ... +55 +5 ... +55
法兰烘烤 (1) °C <150 <150
储存 °C -40 ... +70 -40 ... +70
灯丝温度 °C - 120
一年 30 天的相对湿度    
1×10-7 … 1×10-2 毫巴 % <95 (non-condensing) <95 (non-condensing)
1×10-8 … 1×10-2 毫巴 % <70 (non-condensing) <70 (non-condensing)
供电电压    
在量规 (2) V (dc) +14.5 ... +30 +14.5 ... +30
波纹 V (p-p)

<1

<1

功耗 W <2 <2
待连接的保险丝 AT <1 <1
电压范围    
模拟输出 V 0 ... +10.5 0 ... +10.5
测量范围    
3MAx-xxx-xxxN V <+0.5  
3MBx-xxx-xxxP V -  
3MAx-xxx-xxxQ V +0.667 ... +10  
电压比压力    
3MAx-xxx-xxxN volts per decade 1 (logarithmic)  
3MBx-xxx-xxxP volts per decade -  
3MAx-xxx-xxxQ volts per decade 1.33 (logaritmic)  
错误信号    
3MAx-xxx-xxxN V <+0.5  
3MA-xxx-xxxQ V <+0.3  
3MBx-xxx-xxxP V -  
Output impedance

2 x 4.7 (short circuit-proof)

 
Load impedance kΩ >10 (short circuit-proof)  
阶跃响应时间    
p > 10-6 毫巴 ms

<100

<100

p = 10-8 毫巴 s

~1

 
量规标识 (FCC connector gauges)    
3MAx-0xx-000N kΩ -  
3MAx-0xx-000Q kΩ 100  
3MBx-0xx-000P kΩ -  
状态(针 6)    
Current rating mA 100 (sink)  
High Voltage is ON V (dc) +14.5 ... +30 (depending on supply voltage)  
High Voltage is OFF V (dc) 0  
Status signal, digital output (D-sub connector)    
Supply voltage V (dc)

<30

 
Current rating mA 100  
High voltage ON V (dc)

0

 
High voltage OFF open  
电气连接    
3Mxx-0xx-000x FCC68, 8-pin, female  
3Mxx-0xx-010x D-sub, 9-pin, male  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
传感器电缆    
3Mxx-0xx-000x 8-pin, shielded  
3Mxx-0xx-010x 9-pin, shielded  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
电缆长度    
FCC connector cable m

<50 (0.14 mm2/ conductor)

 
High voltage (in the measuring chamber)    
Ignition voltage kV <4.5  
工作电压 kV <3.3 <3.3
Current (in the measuring chamber)    
High current µA <380  
Low current µA <130  
Setpoint relays (MxG55x)    
Range (N2) mbar bar 5x10-5 ... 1500  
Relay contact normally open (NO), potential free  
Hysteresis % of threshold 10  
Contact rating of mechanical relays V/A <30/ <1  
Switching time ms <30  
曝露在真空的材料    
3Mx0-xxx-xxxx Ni alloy, Mo, AI2O3, glass, stainless steels  
3Mx3-xxx-xxxx Mo, AI2O3, stainless steels  
3Mx0-11x-xxxx Ni alloy, Mo, Al2O3, glass, Ti, stainless steels  
3Mx3-11x-xxxx Mo, Al2O3, Ti, stainless steels  
内部容量    
DN 25 ISO-KF cm³
DN 40 ISO-KF cm³ ~20.9
DN 40 CF-F cm³ ~25.2  
DN 40 CF-R cm³ ~25.6  
内部容量 cm³ 22.8 22.8
重量 (MxG50x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
Weight (MxG55x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
防护等级 IP 40 IP 40
CE conformity    
RoHS 2011/65/EU  
EMC 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1  
Safety EN 61010-1  
RS232C / 485C (MxG50x)    
Baud rates kBaud 9.6/ 19.2/ 38.4/ 57.6  
Address 2 switches (address 00 - 255)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
Connector for RS232 & RS485 D-Sub HD, 15-pin, male  
EtherCAT® (MxG55x)    
Protocol EtherCAT®

 

 
Communication standard

ETG.5003.1  S (R) V1.1.0 4)

ETG.5003.2080 S (R) V1.3.0 5)

 
Node address Explicit Device Identification  
Physical layer 100Base-Tx (IEEE 802.3)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
EtherCAT connector 2 x RJ45, 8-pin (socket), Input & output  
EtherCAT cable Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher)  
Cable lenght m (ft.) <100 (330)  

1)没有电子元件。

2)电源单元的最小电压必须与传感器电缆的长度成比例地增加。

3)冷阴极点燃。

Gemini Ordering Information_13.03.2019.PNG

附件

MAG5xx
零件号 明细
211-098 细目过滤中心环组件DN 25 ISO-KF
351-550 MxG50x 点火单元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400
MPG5xx
零件号 明细
211-098 细目过滤中心环组件DN 25 ISO-KF
351-550 MxG50x 点火单元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400

备件

MAG5xx
零件号 明细
351-500 MAG500 spare sensor, 25KF, SS
351-556 Spare ion chamber ti
351-512 MAG500 spare sensor, 40KF, SS
351-536 MAG500 spare sensor, 40CF-R, SS
351-524 MAG500 spare sensor, 40CF-F, SS
351-502 MAG500 spare sensor, 25KF, TI
351-514 MAG500 spare sensor, 40KF, TI
351-538 MAG500 spare sensor, 40CF-R, TI
351-526 MAG500 spare sensor, 40CF-F, TI
351-501 MAG504 spare sensor, 25KF, SS
351-513 MAG504 spare sensor, 40KF, SS
351-537 MAG504 spare sensor, 40CF-R, SS
351-525 MAG504 spare sensor, 40CF-F, SS
351-503 MAG504 Ersatzsensor, 25KF, TI
351-515 MAG504 spare sensor, 40KF, TI
351-539 MAG504 spare sensor, 40CF-R, TI
351-527 MAG504 spare sensor, 40CF-F, TI
351-995 起辉器
351-555 Spare ion chamber ss
MPG5xx
零件号 明细
351-506 MPG500 spare sensor, 25KF, SS
351-518 MPG500 spare sensor, 40KF, SS
351-542 MPG500 spare sensor, 40CF-R, SS
351-530 MPG500 spare sensor, 40CF-F, SS
351-508 MPG500 spare sensor, 25KF, TI
351-520 MPG500 spare sensor, 40KF, TI
351-544 MPG500 spare sensor, 40CF-R, TI
351-532 MPG500 spare sensor, 40CF-F, TI
351-507 MPG504 spare sensor, 25KF, SS
351-519 MPG504 spare sensor, 40KF, SS
351-543 MPG504 spare sensor, 40CF-R, SS
351-531 MPG504 spare sensor, 40CF-F, SS
351-509 MPG504 spare sensor, 25KF, TI
351-521 MPG504 spare sensor, 40KF, TI
351-545 MPG504 spare sensor, 40CF-R, TI
351-533 MPG504 spare sensor, 40CF-F, TI
351-995 起辉器
351-555 Spare ion chamber ss
351-556 Spare ion chamber ti

数据表

手册

手册

三维步骤文件

视频

其他文件

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