Aerotech ABL1500 直线电机驱动空气轴承平台在垂直表面和水平表面一并采用了有效的预紧处理。它可提供突出的高刚性，是重载和偏置负载应用的理想选择。内置的BLMC 系列无刷直线伺服电机采用了零齿槽效应的无铁芯结构，无吸引力，提供非常的平滑运动。

● 设计用于高性能的扫描和检查
● 兼容450毫米晶圆
● 所有空气轴承表面采用主动空气预紧
● 线性编码器反馈提供亚纳米级分辨率
● 可承受重载荷的高刚性和优秀的几何性能
● 行程达500mm
● 行程范围:  50 mm 100 mm 200 mm 300 mm 400 mm 500 mm

● 驱动系统:  无刷直线伺服电机 (BLMC-192-A)
● 反馈:  非接触直线编码器(LN or LT)
● 分辨率: LN  0.001 μm -0.2 μm
LT 0.005 μm -1.0 μm
● 行程速度:  2 m/s (80 in/s)
● 直线加速度:  2 g -20 m/s2  (无负载)
● 负载:  35.0 kg
● 连续保持推力:  93.6 N
● 峰值推力:  542.8 N
● 全行程精度:   ±0.2 μm ~ ±20.0 μm
● 重复定位精度:  ±0.1 μm~±0.3 μm
● 直线度和平面度: 偏差  ±0.25 μm ~ ±2.0 μm
● 倾斜度/滚摆/偏摆: ±0.5 arc sec ~ ±5 arc sec
● 空气轴承工作压力: 80 psi (5.5 bar) ±5 psig (0.3 bar)
● 空气消耗量: <2 scfm
● 平台质量: 14.7 kg ~ 26.5 kg
● 运动部件质量: (无负载)  5.1 kg
● 材料：铝

空气轴承设计实现高动态性能

The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

直线电机驱动
The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.

零维护
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

电缆管理
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.