Model | V1500X | Plasmamethod | RIE•DPmode | Electrode | Parallelflatstageplate | Electrodematerial | SUS-304 | Chambertemperature | Digitaldisplay | RFgenerator | 100~1500W | Oscillation | 13.56MHz | Controlsystem | LCDTouchpanelwith PLC | Tuningmethod | AutomaticandManual | Timer | 1sec-9H59min59sec | Chambersize | (W)600×(D)550×(H)600mm | Stage size | (W)460×(D)400mm | Chambermaterial | Aluminum | Reactiongas | O2,Ar,CF4 | Purge gas | N2orDryair | Flow meter | Mass flowcontrol2line | Vacuumpump | 1,400L/min | Emergencystopswitch | Pushtypeswitch | Gas port | 2 pc(1/4"SUSswage- lock) | Purge port | 1pc(1/4"SUSswage- lock) | Vacuumport | 1pc(SUSNW40) | Externaldimension | (W)900×(D)1,000×(H)1,700mm | Powersupply | AC200/220/380V3phase 25A | Weight | Approx.300kg | |