品牌
经销商厂商性质
北京市所在地
| 仪器尺寸 | 585mm宽*470mm*410mm高（总高650mm） |
| 重量 | 33.4KG |
| 工作腔室 | 150mm（内径）*127mm（高）硼硅酸盐玻璃腔室，并带整体安全防护罩 |
| 触摸屏用户界面 | 带有触摸按钮的全图像界面，包含多达十个镀膜程序，可提醒何时需要维护 |
| 工作腔室 | 150mm（内径）*127mm（高）硼硅酸盐玻璃腔室，并带整体安全防护罩 |
| 样品台 | 转速为8-20rpm的旋转台 |
| 真空系统 | 涡轮子分子泵：带有内部空气却的涡轮分子泵，抽速为70L/s 旋转机械泵：抽速为50L/m的两级旋转机械泵，带有油污过滤器 |
| 真空测量 | 皮拉尼真空计作为标配 |
| 极限真空度 | 10-5mbar两级 |
| 电源需求 | 90-250V~50/60Hz 1400VA（ 包括旋转机械泵电压240V） |
| 气体 | 溅射工作气体氩气，99.999%（TS和TES版本）；氮气，放气破真空气体（可选） |
| 金属蒸发和光阑清洁头 | 用于源自钨丝篮或舟的金属热蒸发。可配备一个标准钼舟用于清洁SEM或TEM光阑 |
| 碳蒸发 | 稳定的无纹波直流电源控制的脉冲蒸发，确保源自碳棒或碳丝的可重复蒸碳 |
| 电流脉冲 | 1-90安培 |
| 溅射 | 0-150mA。可预设膜厚（需FTM选项）或使用内置定时器 |
| 溅射工作真空范围 | 5*10-3到5*10-1mbar |
| 溅射靶材和碳耗材供应 | EMS150TS和EMS150TES标配铬靶，但可选用的其它靶材范围很宽，包括那些广泛用于SEM制样的靶材，如：Au金靶，Au/pd金钯，Pt铂靶，和Iridium铱靶。对非SEM应用，可选用的靶材包括：AI铝，Ta钽，ITO氧化铟锡，Fe铁，W钨，Ti钛，等等：碳制品包括高纯度碳棒和碳丝纤维 |
| 货号 | 产品名称 |
| 3390 | EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods （3.05mm Ø x 300mm） and a carbon rod shaper （manual operation） |
| 3380 | EMS150T S - High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target |
| 3400 | EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a 57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. |
| 91003 | Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter |
| 货号 | 产品名称 |
| 3200 | Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section |
| 3210 | Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. |
| 3230 | Carbon rod evaporation head insert （for 3.05mm Ø rods） |
| 3240 | Carbon rod evaporation head insert （for 6.15mm Ø rods）. Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical （less wastage）. |
| 3250 | Carbon fiber evaporation head insert |
| 3260 | Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards （T E and T ES versions only）. Supplied with a pack of ten tungsten filaments and a molybdenum boat. |
| 3270 | Extended height vacuum chamber （214mm high – the standard chamber is 127mm high）. For increased source to sample distance and for coating large specimens |
| 3280 | Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited |
| 3290 | Film thickness monitor （FTM） attachment. Consists of a built in chamber mounted quartz crystal oscillator （includes crystal）. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited |
| 3300 | Spare quartz crystals. Pack of three |
| 3320 | Full range vacuum gauge for low and high vacuum measurement （a low vacuum Pirani gauge is fitted as standard） |
| 4513 | Glow discharge insert to modify surface properties （eg hydrophobic to hydrophilic conversion） or to clean surface residues （TS and T ES only）. Can be retrofitted |
| 3600 | Metal evaporation basket - pack of 10 （for use with metal evaporation head） |
| 3610 | Two-year spares kit for EMS150T S Includes: chromium target, glass cylinder, carbon fibre cord, quartz crystals, O-rings |
| 3620 | Two-year spares kit for EMS150T E Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
| 3630 | Two-year spares kit for EMS150T ES Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
| 货号 | 产品名称 |
| 3330 | Rotation stage, 50mm Ø （supplied as standard）. This stage only rotates – no tilt or height adjustment |
| 3340 | Rotate-tilt specimen stage with adjustable tilt （up to 90 degrees） and height （37mm-60mm）. Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
| 3350 | Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm |
| 3360 | Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm |
| 3370 | Rotating specimen stage for glass microscope slides （up to two x 75mm x 25mm slides）. Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used |
| 货号 | 产品名称 |
| 3410 | 57mm Ø x 0.1mm Gold |
| 3411 | 57mm Ø x 0.1mm Gold/Palladium （80/20） |
| 3412 | 57mm Ø x 0.1mm Platinum |
| 3413 | 57mm Ø x 0.1mm Nickel |
| 3414 | 57mm Ø x 0.1mm Silver |
| 3415 | 57mm Ø x 0.1mm Palladium |
| 3416 | 57mm Ø x 0.1mm Copper |
| 3417 | 57mm Ø x 0.3mm Chromium |
| 3418 | 57mm Ø x 0.5mm Tungsten |
| 3419 | 57mm Ø x 1.5mm Chromium |
| 3420 | 57mm Ø x 0.2mm Tungsten |
| 3421 | 54mm Ø x 1.5mm Carbon |
| 3422 | 57mm Ø x 0.1mm Aluminium |
| 3423 | 57mm Ø x 0.1mm Platinum/Palladium （80/20） |
| 3424 | 57mm Ø x 1.5mm Titanium |
| 3425 | 57mm Ø x 0.3mm Platinum/Palladium （80/20） |
| 3426 | 57mm Ø x 0.3mm Gold |
| 3427 | 57mm Ø x 0.3mm Gold/Palladium （80/20） |
| 3428 | 57mm Ø x 0.3mm Platinum |
| 3429 | 57mm Ø x 0.5mm Titanium |
| 3430 | 57mm Ø x 0.1mm Iron |
| 3431 | 57mm Ø x 0.3mm Iridium |
| 3432 | 57mm Ø x 0.1mm Cobalt |
| 3433 | 57mm Ø x 0.1mm Tin |
| 3434 | 57mm Ø x 0.1mm Molybdenum |
| 3435 | 57mm Ø x 0.3mm Magnesium |
| 3436 | 57mm Ø x 0.1mm Tantalum |
| 3437 | 57mm Ø x 3mm Indium Tin Oxide （90/10） |
| 3500 | Carbon rods – 6.15mm Ø x 100mm length （unshaped） pack of 10 |
| 3510 | Carbon rods – 6.15mm Ø x 50mm length （shaped） pack of 10 |
| 3520 | Carbon rods - 3.05mm Ø x 50mm length （shaped） pack of 10 |
| 3530 | Carbon rods 3.05mm Ø x 300mm length （unshaped） pack of 10 |
| 3540 | Carbon fibre cord - high purity - 1m |
| 3550 | Carbon fibre cord - high purity - 5m |
| 3560 | Carbon fibre cord - standard grade - 1m |
| 3570 | Carbon fibre cord - standard grade - 10m |
| 3580 | Carbon fibre cord - standard grade - 100m |
| 3590 | Manual rod shaper for 6.15mm Ø carbon rods |
| 3595 | Manual rod shaper for 3.05mm Ø carbon rods |
